Modeling and simulation of a parametrically resonant micromirror with duty-cycled excitation

Journal of Microelectromechanical Systems

Volumn 23, Issue 6, 2014, Pages 1440-1453

  Shahid, Wajiha ^a   Qiu, Zhen ^a   Duan, Xiyu ^a   Li, Haijun ^b   Wang, Thomas D ^a,b   Oldham, Kenn R ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b UNIVERSITY OF MICHIGAN MEDICAL SCHOOL   (United States)

Author keywords

Hill's equation; MEMS; micro mirror; nonlinear dynamics; parametric resonance

Indexed keywords

DYNAMICS; ELECTROMECHANICAL DEVICES; ELECTROSTATIC ACTUATORS; FREQUENCY RESPONSE; ITERATIVE METHODS; MEDICAL IMAGING; MEMS; MIRRORS; NONLINEAR EQUATIONS; PARAMETRIC DEVICES; SCANNING;

HILL'S EQUATION; ITERATIVE APPROXIMATIONS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICRO MIRROR; NONLINEAR CAPACITANCE; PARAMETRIC RESONANCE; SQUARE WAVE EXCITATION; TORSIONAL MICROMIRRORS;

COMPUTER SIMULATION;

EID: 84915828159     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2014.2315518     Document Type: Article

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