A novel excitation scheme for MEMS gyroscopes using parametric pumping for near inertial grade performance

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6113, Issue , 2006, Pages

  Gallacher, B J ^a   Burdess, J S ^a   Harish, K M ^a  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

Gyroscope; Multiple scales; Parametric excitation

Indexed keywords

ELECTROSTATIC ACTUATORS; OSCILLATORS (MECHANICAL); PERTURBATION TECHNIQUES; RESONATORS;

EXCITATION SCHEME; INERTIAL GRADE PERFORMANCE; MULTIPLE SCALES; PARAMETRIC EXCITATION; PARAMETRIC PUMPING;

GYROSCOPES;

EID: 33646134626     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656323     Document Type: Conference Paper

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