Electromechanically driven and sensed parametric resonance in silicon microcantilevers

Applied Physics Letters

Volumn 88, Issue 26, 2006, Pages

  Requa, Michael V ^a   Turner, Kimberly L ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION; AXIAL LORENTZ FORCES; SENSED PARAMETRIC RESONANCE; SILICON MICROCANTILEVERS;

ACTUATORS; CAVITY RESONATORS; COMPOSITE MICROMECHANICS; HIGH ENERGY PHYSICS; SENSORS; SILICON;

ELECTRON RESONANCE;

EID: 33745602288     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2216033     Document Type: Article

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