Comb-actuated resonant torsional microscanner with mechanical amplification

Journal of Microelectromechanical Systems

Volumn 19, Issue 4, 2010, Pages 936-943

  Arslan, Aslihan ^a   Brown, Dean ^b   Davis, Wyatt O ^b   Holmström, Sven ^a   Gokce, Sertan Kutal ^a   Urey, Hakan ^a  

^a KOÇ UNIVERSITY   (Turkey)

^b MICROVISION INC   (United States)

Author keywords

Comb drive; display; high frequency scanning; mechanical coupling; torsional microscanner

Indexed keywords

ANALYTICAL FORMULAS; COMB DRIVE; COMB FINGERS; COUPLED MODE EQUATION; DAMPING TORQUES; DESIGN INTENT; DISPLAY SYSTEM; EXCITATION VOLTAGE; GAIN FACTORS; HIGH FREQUENCY HF; HIGH RESOLUTION; HIGH VELOCITY; LASER SCANNING; MAXIMUM DEFLECTION; MECHANICAL AMPLIFICATION; MECHANICAL COUPLING; MICROSCANNER; MIRROR FRAMES; NUMBER OF FINGERS; RESONANT MODE; SCAN ANGLE; SCANNING MIRROR; SILICON ON INSULATOR;

AMPLIFICATION; EQUATIONS OF MOTION; MIRRORS;

SCANNING;

EID: 77955356922     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2048095     Document Type: Article

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