Preparation of ZnO nanostructures by RF-magnetron sputtering on thermally oxidized porous silicon substrate for VOC sensing application

Measurement: Journal of the International Measurement Confederation

Volumn 59, Issue , 2015, Pages 248-257

  Al Salman, Husam S ^a,b   Abdullah, M J ^a  

^a SCHOOL OF PHYSICS   (Malaysia)

^b UNIVERSITY OF BASRAH   (Iraq)

Author keywords

Oxidized PS; RF sputtering; VOC sensing application; ZnO nanostructure

Indexed keywords

ACETONE; CHEMICAL SENSORS; HYDROFLUORIC ACID; MAGNETRON SPUTTERING; NANOSTRUCTURES; OXIDATION; SILICON; SILICON COMPOUNDS; SUBSTRATES; VOLATILE ORGANIC COMPOUNDS; ZINC OXIDE;

CRYSTALLINE SILICONS; ELECTRO-CHEMICAL ANODIZATION; OPERATING TEMPERATURE; RF-MAGNETRON SPUTTERING; RF-SPUTTERING; SENSING APPLICATIONS; THERMALLY OXIDIZED; ZNO NANOSTRUCTURES;

POROUS SILICON;

EID: 84908101984     PISSN: 02632241     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.measurement.2014.08.011     Document Type: Article

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