ZnO thin films for VOC sensing applications

Vacuum

Volumn 85, Issue 1, 2010, Pages 101-106

  Al Hardan, N H ^a   Abdullah, M J ^a   Abdul Aziz, A ^a   Ahmad, H ^a   Low, L Y ^a  

^a SCHOOL OF PHYSICS   (Malaysia)

Author keywords

Gas sensors; Nanostructure; RF sputtering; Zinc oxide

Indexed keywords

GAS SENSING APPLICATIONS; GAS SENSORS; ISO-PROPANOLS; RESPONSE BEHAVIOR; RF-SPUTTERING; SENSING APPLICATIONS; THERMALLY OXIDIZED; VOC VAPORS; ZNO; ZNO THIN FILM;

ACETONE; ETHANOL; GAS DETECTORS; GAS SENSING ELECTRODES; METALLIC FILMS; NANOSTRUCTURES; OPTICAL FILMS; SENSORS; THIN FILMS; VAPORS; ZINC; ZINC OXIDE;

FILM PREPARATION;

EID: 77955517230     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2010.04.009     Document Type: Article

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