Anodically bonded submicron microfluidic chambers

Review of Scientific Instruments

Volumn 81, Issue 1, 2010, Pages

  Dimov, S ^a   Bennett, R G ^b   Corcoles A ^b,c   Levitin, L V ^b   Ilic, B ^a   Verbridge, S S ^a   Saunders, J ^b   Casey, A ^b   Parpia, J M ^b  

^a Cornell University   (United States)

^b UNIVERSITY OF LONDON   (United Kingdom)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC BONDING; CHARACTERISTIC SIZE; ELECTRODE STRUCTURE; INTERNAL PRESSURE; INTERNAL SUPPORTS; MICROFLUIDIC CHAMBERS; SUBMICRON;

DIMENSIONAL STABILITY; ELECTRIC FIELDS; SEMICONDUCTING SILICON COMPOUNDS;

SILICON WAFERS;

EID: 75749108617     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3291107     Document Type: Review

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