Atomically-thin MoS2 resonators for pressure sensing

IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings

Volumn , Issue , 2014, Pages

  Lee, Jaesung ^a   Feng, Philip X L ^a  

^a Case Western Reserve University   (United States)

Author keywords

air damping; membrane; molybdenum disulfide (MoS2); pressure sensor; resonator; two dimensional (2D) crystals

Indexed keywords

MEMBRANES; MOLYBDENUM; MOLYBDENUM COMPOUNDS; PRESSURE SENSORS;

AIR DAMPING; DIFFERENT PRESSURES; EXPERIMENTAL INVESTIGATIONS; HIGH FREQUENCY HF; MOLYBDENUM DISULFIDE; RESONANCE FREQUENCIES; SQUEEZE FILM EFFECTS; TWO-DIMENSIONAL (2D) CRYSTALS;

RESONATORS;

EID: 84906871338     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FCS.2014.6859918     Document Type: Conference Paper

References (16)

1. th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 1996), San Diego, CA, USA, Feb. 11-15, 1996, pp. 146-149.
2. J. N. Palasagaram and R. Ramadoss, "MEMS-capacitive pressure sensor fabricated using printed-circuit-processing techniques", IEEE Sensors J., vol. 6, no. 6, pp. 1374-1375, Nov. 2006.
3. W. Pulliam, P. Russler, and R. Fielder, "High-temperature, high bandwidth, fiber-optic, MEMS pressure sensor technology for turbine engine component testing", in Proc. SPIE, Boston, MA, USA, Oct. 28, 2001, vol. 4578, pp. 229-238.
4. D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T Boyd, "Novel MEMS pressure and temperature sensors fabricated on optical fibers", J. Micromech. Microeng., vol. 12, no. 3, pp. 229-235, Mar. 2002.
5. O. Ergincan, G. Palasantzas, and J. Kooi, "Viscous damping of microcantilevers with modified surfaces and geometries", Appl. Phys. Lett., vol. 101, no. 6, Art. No. 061908, Aug. 2012.
6. S. Bianco, M. Cocuzza, S. Ferrero, E. Giuri, G. Piacenza, C. F. Pirri, A. Ricci, L. Scaltrito, D. Bich, A. Merialdo, P. Schina, and R. Correale, "Silicon resonant microcantilevers for absolute pressure measurement", J. Vac. Sci. Technol. B, vol. 24, no. 4, pp. 1803-1809, Jun. 2006.
7. D. R. Southworth, H. G. Craighead, and J. M. Parpia, "Pressure dependent resonant frequency of micromechanical drumhead resonators", Appl. Phys. Lett., vol. 94, no. 21, Art. No. 213506, May 2009.
8. J. S. Bunch, A. M. van der Zande, S. S. Verbridge, I. W. Frank, D. M. Tanenbaum, J. M. Parpia, H. G. Craighead, and P. L. McEuen, " Electromechanical resonators from graphene sheets", Science, vol. 315, no. 5811, pp. 490-493, Jan. 2007.
9. 2 nanomechanical resonators", ACS Nano, vol. 7, no. 7, pp. 6086-6091, Jun. 2013.
10. 2: a new direct-gap semiconductor", Phys. Rev. Lett., vol. 105, no. 13, Art. No. 136805, Sep. 2010.
11. M. Bao and H. Yang, "Squeeze film air damping in MEMS", Sens. Actuators A, vol. 136, no.1, pp. 3-27, May 2007.
12. M. K. Andrews, G. C. Turner, P. D. Harris, and I. M. Harris, "A resonant pressure sensor based on a squeezed film of gas", Sens. Actuators A, vol. 36, no. 3, pp. 219-226, May 1993.
13. A. D. Smith, F. Niklaus, A. Paussa, S. Vaziri, A. C. Fischer, M. Sterner, F. Forsberg, A. Delin, D. Esseni, P. Palestri, M. Östling, and M. C. Lemme, "Electromechanical piezoresistive sensing in suspended graphene membranes", Nano Lett., vol. 13, no. 7, pp. 3237-3242, Jun. 2013.
14. C. Hierold, A. Jungen, C. Stampfer, and T. Helbling, "Nano electromechanical sensors based on carbon nanotubes", Sens. Actuators A, vol. 136, no. 1, pp. 51-61, May. 2007.
15. C. Stampfer, T. Helbling, D. Obergfell, B. Schöberle, M. K. Tripp, A. Jungen, S. Roth, V. M. Bright, and C. Hierold, "Fabrication of singlewalled carbon-nanotube-based pressure sensors", Nano Lett., vol. 6, no. 2, pp. 233-237, Jan. 2006.
16. M. Narducci, L. Y. Chia, W. Fang, and J. Tsai, "CMOS MEMS capacitive absolute pressure sensor", J. Micromech. Microeng., vol. 23, no. 5, Art. No. 055007, Mar. 2013.