High-temperature, high bandwidth, fiber-optic, MEMS pressure sensor technology for turbine engine component testing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4578, Issue , 2001, Pages 229-238

  Pulliam, Wade ^a   Russler, Patrick ^b   Fielder, Robert ^a  

^a LUNA INNOVATIONS INC   (United States)

^b NONE   (United States)

Author keywords

Fiber optic; High temperature; MEMS; Pressure; Sapphire; Sensors; Turbine engines

Indexed keywords

BANDWIDTH; FRICTION; HIGH TEMPERATURE EFFECTS; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL VARIABLES MEASUREMENT; PRESSURE EFFECTS; TURBINES; WEAR RESISTANCE;

FABRY-PEROT INTERFEROMETRY; HIGH CYCLE FATIGUE; SKIN FRICTION;

FIBER OPTIC SENSORS;

EID: 0035775986     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.456079     Document Type: Article

References (11)

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