Room temperature sensing of O2 and CO by atomic layer deposition prepared ZnO films coated with Pt nanoparticles

ECS Transactions

Volumn 58, Issue 10, 2013, Pages 203-214

  Erkens, I J M ^a,b   Blauw, M A ^c   Verheijen, M A ^a   Roozeboom, F ^a   Kessels, W M M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b HOLST CENTRE   (Netherlands)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; METAL NANOPARTICLES; PLATINUM; ZINC OXIDE;

CURRENT RESPONSE; GAS SENSING DEVICES; PROPORTIONAL CHANGE; REFERENCE DEVICES; ROOM TEMPERATURE; ROOM TEMPERATURE SENSING; SENSING MECHANISM; SENSING PERFORMANCE;

ATOMIC LAYER DEPOSITION;

EID: 84904913290     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/05810.0203ecst     Document Type: Conference Paper

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