Oxygen sensing with ZnO thin films

Proceedings of IEEE Sensors

Volumn , Issue , 2011, Pages 1416-1419

  Blauw, M A ^a   Dam, V A T ^a   Crego Calama, M ^a   Brongersma, S H ^a   Musschoot, J ^b   Detavernier, C ^b  

^a HOLST CENTRE   (Netherlands)

^b GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BULK DIFFUSIONS; OXYGEN-SENSING; REDUCED POWER CONSUMPTION; RESPONSIVITY; SENSING CHARACTERISTICS; SURFACE-TO-VOLUME RATIO; ZNO; ZNO THIN FILM;

ATOMIC LAYER DEPOSITION; METALLIC FILMS; OPTICAL FILMS; RAPID THERMAL ANNEALING; ZINC OXIDE;

SENSORS;

EID: 84856837909     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2011.6127128     Document Type: Conference Paper

References (5)

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