High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators

Nature Communications

Volumn 5, Issue , 2014, Pages

  Sansa, Marc ^a   Fernández Regúlez, Marta ^a   Llobet, Jordi ^a   San Paulo, Álvaro ^a,b   Pérez Murano, Francesc ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBE; NANOWIRE; SILICON; SILICON NANOWIRES; UNCLASSIFIED DRUG;

AMPLITUDE; ASYMMETRY; CARBON; NANOTECHNOLOGY; PIEZOMETER; SIGNAL; SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; FREQUENCY MODULATION; HIGH SENSITIVITY LINEAR PIEZORESISTIVE TRANSDUCTION; MECHANOTRANSDUCTION; NANODEVICE; NANOMECHANICAL BEAM RESONATOR; SCANNING ELECTRON MICROSCOPY; SIGNAL NOISE RATIO; VIBRATION;

EID: 84903973980     PISSN: None     EISSN: 20411723     Source Type: Journal    
DOI: 10.1038/ncomms5313     Document Type: Article

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