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Volumn , Issue , 2003, Pages 37-64

Silicon and glass micromachining for μTAS

Author keywords

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Indexed keywords


EID: 84903676050     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-044451100-3/50003-6     Document Type: Chapter
Times cited : (14)

References (56)
  • 7
    • 0020127035 scopus 로고
    • Silicon as a mechanical material
    • Petersen K.E. Silicon as a mechanical material. Proc. IEEE 1982, 70-5:420.
    • (1982) Proc. IEEE , pp. 420
    • Petersen, K.E.1
  • 11
    • 84903684391 scopus 로고
    • Alternative Verfahren der Mikrostrukturierung, Chapter 8
    • VCH Verlagsgesellschaft mbH, Weinheim
    • Menz W., Bley P. Alternative Verfahren der Mikrostrukturierung, Chapter 8. Mikrosystemtechnik für Igenieure 1993, VCH Verlagsgesellschaft mbH, Weinheim.
    • (1993) Mikrosystemtechnik für Igenieure
    • Menz, W.1    Bley, P.2
  • 33
    • 6744225835 scopus 로고    scopus 로고
    • Wafer direct bonding: tailoring adhesion between brittle materials
    • Plößl A., Kräuter G. Wafer direct bonding: tailoring adhesion between brittle materials. Mat. Science Eng. 1999, R25:1.
    • (1999) Mat. Science Eng. , vol.R25 , pp. 1
    • Plößl, A.1    Kräuter, G.2
  • 48
    • 85133293855 scopus 로고    scopus 로고
    • Nanoport is a trademark of Upchurch Scientific
    • P.O. Box 1529, 619 Oak Street, Oak Harbor, WA 98277, U.S.A
    • Nanoport is a trademark of Upchurch Scientific, P.O. Box 1529, 619 Oak Street, Oak Harbor, WA 98277, U.S.A.
  • 56
    • 0038076354 scopus 로고    scopus 로고
    • MAFIAS: An integrated Lab-On-A-Chip for the measurement of ammonium
    • University of Twente, Enschede, The Netherlands
    • Veenstra T.T. MAFIAS: An integrated Lab-On-A-Chip for the measurement of ammonium. PhD thesis 2001, University of Twente, Enschede, The Netherlands.
    • (2001) PhD thesis
    • Veenstra, T.T.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.