Multi-walled microchannels: free-standing porous silicon membranes for use in μTAS

Journal of Microelectromechanical Systems

Volumn 9, Issue 4, 2000, Pages 495-501

  Tjerkstra, R Willem ^a,b,c   Gardeniers, Johannes G E ^b,d,e   Kelly, John J ^a,c,f,g,h   Van Den Berg, Albert ^b,e,i,j,k,l  

^a UTRECHT UNIVERSITY   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

^c UTRECHT UNIVERSITY   (Netherlands)

^d RADBOUD UNIVERSITY NIJMEGEN   (Netherlands)

^e UNIVERSITY OF TWENTE   (Netherlands)

^f UNIVERSITY COLLEGE DUBLIN   (Ireland)

^g PHILIPS RESEARCH LABORATORIES   (Germany)

^h PHILIPS RESEARCH LABORATORIES   (Netherlands)

ⁱ CSEM   (Switzerland)

^j Chemical Sensor Department   (Netherlands)

^k UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^l Faculty of Electrical Engineering   (Serbia)

more..

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMICAL ETCHING; FIELD EMISSION GUN SCANNING ELECTRON MICROSCOPY; MICROBATTERIES; MICROSIEVES; MICROTOTAL ANALYSIS SYSTEM; MULTIWALLED MICROCHANNELS;

CHEMICAL VAPOR DEPOSITION; CURRENT DENSITY; ELECTRODES; MASKS; PHOTOLITHOGRAPHY; PORE SIZE; POROUS SILICON; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY;

MICROELECTROMECHANICAL DEVICES;

EID: 0034469352     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.896771     Document Type: Article

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