Advanced sacrificial poly-Si technology for fluidic systems

Journal of Micromechanics and Microengineering

Volumn 12, Issue 5, 2002, Pages 621-624

  Berenschot, J W ^a   Tas, N R ^a   Lammerink, T S J ^a   Elwenspoek, M ^a   Van Den Berg, A ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ETCHING; POTASSIUM COMPOUNDS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES;

FLUIDIC SYSTEMS; POLYSILICON TECHNOLOGY;

POLYSILICON;

EID: 0036732311     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/5/317     Document Type: Article

References (7)

1. Micro-diaphragm pressure sensor
2. Surface micromachined microdiaphragm pressure sensors
3. Nanochannel fabrication for chemical sensors
4. Precise mask alignment to the crystallographic orientation of silicon
5. Micro filtration membrane sieve with silicon micro machining
6. Micro mixer with fast diffusion