Low consumption single-use microvalve for microfluidic PCB-based platforms

Journal of Micromechanics and Microengineering

Volumn 24, Issue 6, 2014, Pages

  Flores, G ^a   Aracil, C ^a   Perdigones, F ^a   Quero, J M ^a  

^a UNIVERSITY OF SEVILLE   (Spain)

Author keywords

microvalve; PCB MEMS; SU 8

Indexed keywords

CHEMICAL ACTIVATION; ENERGY UTILIZATION; MICROFLUIDICS;

FABRICATION PROCESS; MICRO VALVES; MICROFLUIDIC CHANNEL; MICROFLUIDIC CIRCUIT; MICROFLUIDIC PLATFORMS; ORDERS OF MAGNITUDE; PCB-MEMS; SU-8;

VALVES (MECHANICAL);

EID: 84903589542     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/24/6/065013     Document Type: Article

References (24)

1. Oh K W and Ahn C H 2006 Topical review: a review of microvalves J. Micromech. Microeng. 16 13 (Pubitemid 43803185)
2. Cardenas-Valencia A M, Dlutowski J, Bumgarner J, Muñoz C, Wang W, Popuri R and Langebrake L 2007 Development of various designs of low-power, MEMS valves for fluidic applications Sensors Actuators A 136 374-84 (Pubitemid 46590688)
3. Li X T and Wang A Q 2012 High-sealing microvalves for PCR Adv. Mater. Res. 383 2025-30
4. Calvo V, Ezkerra A, Elizalde J, Fernández L J, Berganzo J, Mayora K and Ruano-López JM 2011 A highly integrated vertical SU8 valve for stepwise in-series reactions J. Micromech. Microeng. 21 065037
5. Luo C, Liu X, Poddar R, Garra J, Gadre A P, Keuren E V, Schneider T, White R, Currie J and Paranjape M 2006 Thermal ablation of pmma for water release using a microheater J. Micromech. Microeng. 16 580 (Pubitemid 43289735)
6. Bu M, Perch-Nielsen I R, Sun Y and Wolff A 2011 A microfluidic control system with re-usable micropump/valve actuator and injection moulded disposable polymer lab-on-a-slide TRANSDUCERS'11: 16th IEEE Int. Solid-State Sensors, Actuators and Microsystems Conf. pp 1244-7
7. Yoo J-C, Moon M-C, Choi Y J, Kang C J and Kim Y-S 2006 A thermopneumatic-actuated polydimethylsiloxane microfluidic system NEMS'06: 1st IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems pp 1379-83
8. Sánchez-Ferrer A, Fischl T, Stubenrauch M, Albrecht A, Wurmus H, Hoffmann M and Finkelmann H 2011 Liquid-crystalline elastomer microvalve for microfluidics Adv. Mater. 23 4526-30
9. Merkel T, Graeber M and Pagel L 1999 A new technology for fluidic microsystems based on PCB technology Sensors Actuators A 77 98-105 (Pubitemid 30505966)
10. Gaßmann S, Ibendorf I and Pagel L 2007 Realization of a flow injection analysis in PCB technology Sensors Actuators A 133 231-5 (Pubitemid 44937593)
11. Pitchaimani K, Sapp B C, Winter A, Gispanski A, Nishida T and Fan Z H 2009 Manufacturable plastic microfluidic valves using thermal actuation Lab Chip 9 3082-7
12. Guerin L J, Dubochet O, Zeberli J-F, Clot P and Renaud P 1998 Miniature one-shot valve MEMS'98: Proc. 11th Annu. Int. Workshop on Micro Electro Mechanical Systems pp 425-8
13. Debray A, Shibata M and Fujita H 2007 A low melting point alloy as a functional material for a one-shot micro-valve J. Micromech. Microeng. 17 1442 (Pubitemid 47214502)
14. Bejhed J, Rangsten P and Köhler J 2007 Demonstration of a single use microsystem valve for high gas pressure applications J. Micromech. Microeng. 17 472 (Pubitemid 46778458)
15. Madou M J and Tierney M J 1994 Micro-electrochemical valves and method US Patent No 5368704 A www.google.com/patents/us5368704
16. Li P-Y, Givrad T K, Holschneider D P, Maarek J-M I and Meng E 2009 A parylene MEMS electrothermal valve J. Microelectromech. Syst. 18 1184-97
17. Moreno J M and Quero J M 2010 A novel single-use SU-8 microvalve for pressure-driven microfluidic applications J. Micromech. Microeng. 20 015005
18. Perdigones F, Aracil C, Moreno J M, Luque A and Quero J M 2014 Highly integrable pressurized microvalve for portable SU-8 microfluidic platforms J. Microelectromech. Syst. 23 398-405
19. Aracil C, Quero J M, Luque A, Moreno J M and Perdigones F 2010 Pneumatic impulsion device for microfluidic systems Sensors Actuators A 163 247-54
20. Aracil C, Perdigones F, Moreno J M and Quero J M 2010 BETTS: bonding, exposing and transferring technique in SU-8 for microsystems fabrication J. Micromech. Microeng. 20 035008
21. McDonald J C, Metallo S J and Whitesides G M 2001 Fabrication of a configurable, single-use microfluidic device Anal. Chem. 73 5645-50 (Pubitemid 33126719)
22. Ahn C H, Choi J-W, Beaucage G, Nevin J H, Lee J-B, Puntambekar A and Lee J Y 2004 Disposable smart lab on a chip for point-of-care clinical diagnostics Proc. IEEE 92 154-73 (Pubitemid 40890777)
23. Moreno J M and Quero J M 2010 A novel single-use SU-8 microvalve for pressure-driven microfluidic applications J. Micromech. Microeng. 20 015005
24. Moreno J M, Perdigones F and Quero J M 2011 Fabrication process of a SU-8 monolithic pressurized microchamber for pressure driven microfluidic applications CDE'11: Proc. IEEE 8th Spanish Conf. on Electron Devices pp 1-4