A low melting point alloy as a functional material for a one-shot micro-valve

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1442-1450

  Debray, A ^a   Shibata, M ^a   Fujita, H ^b  

^a CANON INC   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MELTING POINT; MEMS; MICROMECHANICS; PRESSURE EFFECTS; THERMAL EFFECTS;

MELTING POINT ALLOY; WORKING PRINCIPLE;

VALVES (MECHANICAL);

EID: 34547687369     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/005     Document Type: Article

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