A thermopneumatic-actuated polydimethylsiloxane microfluidic system

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 1379-1383

  Yoo, Jong Chul ^a   Moon, Min Chul ^a   Choi, Y J ^a   Kang, C J ^a   Kim, Yong Sang ^a  

^a Myong Ji University   (South Korea)

Author keywords

ITO; Microfluidic; Micropump; Microvalve; PDMS

Indexed keywords

CONDUCTIVE FILMS; FLOW RATE; FLUIDIC DEVICES; MICROCHANNELS; MOLECULES; NANOFLUIDICS; NEMS; OPTICAL DESIGN; PUMPS; SWITCHING FUNCTIONS; TIN; TITANIUM COMPOUNDS; VALVES (MECHANICAL);

(PL) PROPERTIES; APPLIED (CO); COATED GLASS; CUT-OFF; DUTY RATIO; FABRICATION PROCESSES; INDIUM TIN OXIDE (ITO); INTERNATIONAL CONFERENCES; ITO HEATER; LOW COST FABRICATION; MEMBRANE THICKNESS; MICRO FLUIDIC SYSTEMS; MICRO PUMPING; MICRO VALVES; MICRO-VALVES; MICROPUMP AND MICROVALVE; MOLECULAR SYSTEMS; POLY-DIMETHYL SILOXANE (PDMS); POLY-DIMETHYL-SILOXANE (PDMS) MEMBRANE; POWER INCREASE; PULSE POWER; PUMPING RATES; TRANSPARENT PROPERTIES;

MICROFLUIDICS;

EID: 46149110510     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334770     Document Type: Conference Paper

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