Demonstration of a single use microsystem valve for high gas pressure applications

Journal of Micromechanics and Microengineering

Volumn 17, Issue 3, 2007, Pages 472-481

  Bejhed, Johan ^a   Rangsten, Pelle ^b   Köhler, Johan ^a,c  

^a UPPSALA UNIVERSITY   (Sweden)

^b NanoSpace AB   (Sweden)

^c EUROPEAN SPACE AGENCY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEBRIS; FILTERS (FOR FLUIDS); HIGH PRESSURE EFFECTS; MELTING; MEMS; SOLDERING ALLOYS;

ACTIVATION PROCESS; GAS PRESSURE APPLICATIONS; PARTICLE DEBRIS;

VALVES (MECHANICAL);

EID: 34249003403     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/3/008     Document Type: Article

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