Miniature one-shot valve

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 425-428

  Guerin, L J ^a   Dubochet, O ^a   Zeberli, J F ^a   Clot, Ph ^a   Renaud, Ph ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; EXCIMER LASERS; LASER ABLATION; MICROMACHINING;

ELECTROCHEMICAL DISCHARGE MICROMACHINING; ONE SHOT VALVES;

MICROELECTROMECHANICAL DEVICES;

EID: 0031677952     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)