XPS study of effects of water vapor during Ar-GCIB irradiations on PMMA

Applied Surface Science

Volumn 310, Issue , 2014, Pages 112-114

  Toyoda, Noriaki ^a   Yamada, Isao ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Etching; GCIB; PMMA; Surface reactions; Water vapor; XPS

Indexed keywords

ESTERS; ETCHING; IRRADIATION; RADIATION; SURFACE REACTIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL REACTION ENHANCEMENT; ETCHING DEPTH; GCIB; IRRADIATION DAMAGE; LOW-ENERGY; PMMA;

WATER VAPOR;

EID: 84903278405     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2014.03.046     Document Type: Article

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