Novel precision machining using gas cluster ion beams

Surface and Coatings Technology

Volumn 201, Issue 19-20 SPEC. ISS., 2007, Pages 8624-8627

  Toyoda, Noriaki ^a   Houzumi, Shingo ^a   Mashita, Takafumi ^a   Mitamura, Tohru ^a   Mochiji, Kozo ^a   Yamada, Isao ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Cluster ion beam; High rate etching; Precision machining; Surface smoothing

Indexed keywords

CLUSTER ION BEAM; HIGH RATE ETCHING; PRECISION MACHINING; SURFACE SMOOTHING;

ETCHING; ION BEAMS; ION BOMBARDMENT;

MACHINING;

ETCHING; ION BEAMS; ION BOMBARDMENT; MACHINING;

EID: 34447518820     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.09.335     Document Type: Article

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