Reactive sputtering by SF6 cluster ion beams

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 484-488

  Toyoda, N ^a   Kitani, H ^a   Matsuo, J ^a   Yamada, I ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORINE COMPOUNDS; GOLD; ION BOMBARDMENT; SILICON; SILVER; SULFUR COMPOUNDS; SURFACE TREATMENT; TUNGSTEN;

SULFUR HEXAFLUORIDES CLUSTER ION BEAMS;

SPUTTERING;

EID: 0031546250     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00555-1     Document Type: Article

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