Finite-size effects and analytical modeling of electrostatic force microscopy applied to dielectric films

Nanotechnology

Volumn 25, Issue 25, 2014, Pages

  Gomila, G ^a,b   Gramse, G ^a,b,c   Fumagalli, L ^a,b  

^a INSTITUTE FOR BIOENGINEERING OF CATALONIA IBEC   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

^c JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

Dielectric constant; Dielectric films; Electrostatic force microscopy; Quantification

Indexed keywords

ANALYTICAL MODELS; ELECTRIC FORCE MICROSCOPY; ELECTROSTATIC FORCE; FILM THICKNESS; PERMITTIVITY; PROBES; SUBSTRATES; ULTRATHIN FILMS;

ACCURATE QUANTIFICATIONS; ELECTROSTATIC FORCE MICROSCOPY; FINITE SIZE EFFECT; LATERAL DIMENSION; METALLIC SUBSTRATE; NUMERICAL CALCULATION; POLARIZATION FORCES; QUANTIFICATION;

DIELECTRIC FILMS;

EID: 84902007669     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/25/25/255702     Document Type: Article

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