Analysis of the capacitive pressure sensor with ring mesa structure

International Journal of Precision Engineering and Manufacturing

Volumn 15, Issue 6, 2014, Pages 1023-1028

  Kwon, Soon Kwan ^a   Cho, Hee Chan ^a   Yi, Seung Hwan ^a  

^a Chungju National University   (South Korea)

Author keywords

Capacitance of pressure sensor; Capacitive pressure sensor; Circular diaphragm; Displacement of diaphragm; Laundry machine; Ring mesa

Indexed keywords

CAPACITANCE; CLEANING; FITS AND TOLERANCES; LAUNDRIES; PARTIAL PRESSURE SENSORS; PRESSURE SENSORS;

CAPACITIVE PRESSURE SENSORS; CHARACTERISTIC CURVE; CIRCULAR DIAPHRAGMS; LAUNDRY MACHINES; MECHANICAL PRESSURE; NON-LINEARITY ERRORS; NONLINEAR CURVES; WATER PRESSURES;

CAPACITIVE SENSORS;

EID: 84901929595     PISSN: 22347593     EISSN: 20054602     Source Type: Journal    
DOI: 10.1007/s12541-014-0431-9     Document Type: Article

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