-
5
-
-
0024764864
-
Normally closed microvalve and micropump fabricated on a silicon wafer
-
Shoji S., Esashi M., and Nakano A. Normally closed microvalve and micropump fabricated on a silicon wafer. Sens Actuators Phys A 20 (1989) 163-169
-
(1989)
Sens Actuators Phys A
, vol.20
, pp. 163-169
-
-
Shoji, S.1
Esashi, M.2
Nakano, A.3
-
6
-
-
0042638062
-
A novel micromachined pump based on thick-film piezoelectric actuation
-
Koch M., Harris N., Evans A., White N., and Brunnschweiler A. A novel micromachined pump based on thick-film piezoelectric actuation. Sens Actuators Phys A 70 (1998) 98-103
-
(1998)
Sens Actuators Phys A
, vol.70
, pp. 98-103
-
-
Koch, M.1
Harris, N.2
Evans, A.3
White, N.4
Brunnschweiler, A.5
-
7
-
-
0029328067
-
A new micropump principle of the reciprocating type using pyramidic micro flowchannels as passive valves
-
Gerlach T., Schuenemann M., and Wurmus H. A new micropump principle of the reciprocating type using pyramidic micro flowchannels as passive valves. J Micromech Microeng 5 (1995) 199-201
-
(1995)
J Micromech Microeng
, vol.5
, pp. 199-201
-
-
Gerlach, T.1
Schuenemann, M.2
Wurmus, H.3
-
8
-
-
0030692163
-
Pumping gases by a silicon micro pump with dynamic passive valves
-
Gerlach T. Pumping gases by a silicon micro pump with dynamic passive valves. Proceedings Transducers '97, Chicago (1997) 357-360
-
(1997)
Proceedings Transducers '97, Chicago
, pp. 357-360
-
-
Gerlach, T.1
-
11
-
-
0029350360
-
A bidirectional silicon micropump
-
Zengerle R., Ulrich J., Kluge S., Richter M., and Richter A. A bidirectional silicon micropump. Sens Actuators Phys A 50 (1995) 81-86
-
(1995)
Sens Actuators Phys A
, vol.50
, pp. 81-86
-
-
Zengerle, R.1
Ulrich, J.2
Kluge, S.3
Richter, M.4
Richter, A.5
-
13
-
-
0034830475
-
A self-filling micropump based on PCB technology
-
Wego A., and Pagel L. A self-filling micropump based on PCB technology. Sens Actuators Phys A 88 (2001) 220-226
-
(2001)
Sens Actuators Phys A
, vol.88
, pp. 220-226
-
-
Wego, A.1
Pagel, L.2
-
14
-
-
0033727443
-
A check-valved silicone diaphragm pump
-
Meng E., Wang X., Mak H., and Tai Y. A check-valved silicone diaphragm pump. Proceedings MEMS '00, Miyazaki, Japan (2000) 62-67
-
(2000)
Proceedings MEMS '00, Miyazaki, Japan
, pp. 62-67
-
-
Meng, E.1
Wang, X.2
Mak, H.3
Tai, Y.4
-
15
-
-
0028312580
-
LIGA micropump for gases and liquids
-
Rapp R., Schomburg W., Mass D., Schulz J., and Stark W. LIGA micropump for gases and liquids. Sens Actuators Phys A 40 (1994) 57-61
-
(1994)
Sens Actuators Phys A
, vol.40
, pp. 57-61
-
-
Rapp, R.1
Schomburg, W.2
Mass, D.3
Schulz, J.4
Stark, W.5
-
17
-
-
0030261269
-
A silicon membrane micropump with integrated bimetallic actuator
-
Zhan G., Lo T., Liu L., and Tsien P. A silicon membrane micropump with integrated bimetallic actuator. Chin J Electron 5 (1996) 29-35
-
(1996)
Chin J Electron
, vol.5
, pp. 29-35
-
-
Zhan, G.1
Lo, T.2
Liu, L.3
Tsien, P.4
-
18
-
-
0037058643
-
Fabrication and testing of a magnetically actuated micropump
-
Santra S., Holloway P., and Batich C. Fabrication and testing of a magnetically actuated micropump. Sens Actuators Chem B 87 (2002) 358-364
-
(2002)
Sens Actuators Chem B
, vol.87
, pp. 358-364
-
-
Santra, S.1
Holloway, P.2
Batich, C.3
-
19
-
-
0033731832
-
Design, optimization and simulation on microelectromagnetic pump
-
Gong Q., Zhou A., Yang Y., and Wang X. Design, optimization and simulation on microelectromagnetic pump. Sens Actuators Phys A 83 (2000) 200-207
-
(2000)
Sens Actuators Phys A
, vol.83
, pp. 200-207
-
-
Gong, Q.1
Zhou, A.2
Yang, Y.3
Wang, X.4
-
20
-
-
0025416023
-
The fabrication and use of micromachined corrugated silicon diaphragm
-
Jerman J. The fabrication and use of micromachined corrugated silicon diaphragm. Sens Actuators Phys A 21-23 (1990) 988-992
-
(1990)
Sens Actuators Phys A
, vol.21-23
, pp. 988-992
-
-
Jerman, J.1
-
21
-
-
0033741496
-
Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm
-
Jeong O., and Yang S. Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm. Sens Actuators Phys A 83 (2000) 249-255
-
(2000)
Sens Actuators Phys A
, vol.83
, pp. 249-255
-
-
Jeong, O.1
Yang, S.2
-
23
-
-
0030092114
-
Coupled FEM simulation for the characterization of the fluid flow within a micromachined cantilever valve
-
Koch M., Evans A., and Brunnschweiler A. Coupled FEM simulation for the characterization of the fluid flow within a micromachined cantilever valve. J Micromech Microeng 6 (1996) 112-114
-
(1996)
J Micromech Microeng
, vol.6
, pp. 112-114
-
-
Koch, M.1
Evans, A.2
Brunnschweiler, A.3
-
25
-
-
0031176323
-
Simulation and fabrication of micromachined cantilever valves
-
Koch M., Evans A., and Brunnschweiler A. Simulation and fabrication of micromachined cantilever valves. Sens Actuators Phys A 62 (1997) 756-759
-
(1997)
Sens Actuators Phys A
, vol.62
, pp. 756-759
-
-
Koch, M.1
Evans, A.2
Brunnschweiler, A.3
-
26
-
-
30244493475
-
Static and dynamic flow simulation of a KOH-etched microvalve using the finite-element method
-
Zengerle R., and Ulrich J. Static and dynamic flow simulation of a KOH-etched microvalve using the finite-element method. Sens Actuators Phys A 53 (1996) 379-385
-
(1996)
Sens Actuators Phys A
, vol.53
, pp. 379-385
-
-
Zengerle, R.1
Ulrich, J.2
-
27
-
-
0031224736
-
Analytical static modeling and optimization of electrostatic micropumps
-
Francais O., Dufour I., and Sarraute E. Analytical static modeling and optimization of electrostatic micropumps. J Micromech Microeng 7 (1997) 183-185
-
(1997)
J Micromech Microeng
, vol.7
, pp. 183-185
-
-
Francais, O.1
Dufour, I.2
Sarraute, E.3
-
30
-
-
0343443396
-
Performance simulation of microminiaturized membrane pumps
-
Zengerle R., Richter M., Brosinger F., Richter A., and Sandmaier H. Performance simulation of microminiaturized membrane pumps. Proceedings 7th International Conference of Solid-State Sensors and Actuators, TRANSDUCERS '93 (1993) 106-109
-
(1993)
Proceedings 7th International Conference of Solid-State Sensors and Actuators, TRANSDUCERS '93
, pp. 106-109
-
-
Zengerle, R.1
Richter, M.2
Brosinger, F.3
Richter, A.4
Sandmaier, H.5
-
31
-
-
0030349433
-
Modeling micropumps with electrical equivalent networks
-
Bourouina T., and Grandchamp J. Modeling micropumps with electrical equivalent networks. J Micromech Microeng 6 (1996) 398-404
-
(1996)
J Micromech Microeng
, vol.6
, pp. 398-404
-
-
Bourouina, T.1
Grandchamp, J.2
-
32
-
-
0032048644
-
Electrofluidic full-systems modeling of a flap valve micropump based on kirchhoffian network theory
-
Voigt P., Schrag G., and Wachutka G. Electrofluidic full-systems modeling of a flap valve micropump based on kirchhoffian network theory. Sens Actuators Phys A 66 (1998) 9-14
-
(1998)
Sens Actuators Phys A
, vol.66
, pp. 9-14
-
-
Voigt, P.1
Schrag, G.2
Wachutka, G.3
-
33
-
-
33745634027
-
-
Hammad BK. Characterization of smart MEMS pump by applying quasi-static model based on simulations of membrane and solid-fluid interface of microvalves. Master's thesis. University of Texas at Arlington; 2003.
-
-
-
-
35
-
-
33745629987
-
-
Presented at Nanotech 2002, Houston, TX, September 9-13
-
Yih T.C., Chen R.S., Lee H.H., Lee G.B., and Liu C.C. Optimal efficiency of an electromagnetically actuated micro-pump under the consideration of micro-viscosity effect. Presented at Nanotech 2002, Houston, TX, September 9-13 (2002)
-
(2002)
Optimal efficiency of an electromagnetically actuated micro-pump under the consideration of micro-viscosity effect
-
-
Yih, T.C.1
Chen, R.S.2
Lee, H.H.3
Lee, G.B.4
Liu, C.C.5
-
37
-
-
0026370557
-
Large deflection performance of surface micromachined corrugated diaphragms
-
Van Mullem C.J., Gabriel K.J., and Fujita H. Large deflection performance of surface micromachined corrugated diaphragms. Proceedings, International Conference Solid-State Sensors and Actuators, TRANSDUCERS '91 (1991) 1014-1017
-
(1991)
Proceedings, International Conference Solid-State Sensors and Actuators, TRANSDUCERS '91
, pp. 1014-1017
-
-
Van Mullem, C.J.1
Gabriel, K.J.2
Fujita, H.3
-
38
-
-
0028448052
-
Performance of non-planar silicon diaphragms under large deflections
-
Zhang Y., and Wise D. Performance of non-planar silicon diaphragms under large deflections. J Microelectromech Syst 3 (1994) 59-68
-
(1994)
J Microelectromech Syst
, vol.3
, pp. 59-68
-
-
Zhang, Y.1
Wise, D.2
-
39
-
-
84986849767
-
Fabrication and characterization of a silicon microvalve
-
Emmer A., Jansson M., and Roeraade J. Fabrication and characterization of a silicon microvalve. J Micromech Microeng 4 (1992) 13-15
-
(1992)
J Micromech Microeng
, vol.4
, pp. 13-15
-
-
Emmer, A.1
Jansson, M.2
Roeraade, J.3
-
40
-
-
0024699447
-
A batch-fabricated non-reverse valve with cantilever beam manufactured by micromachining of silicon
-
Tiren J., Tenerz L., and Hök B. A batch-fabricated non-reverse valve with cantilever beam manufactured by micromachining of silicon. Sens Actuators Phys A 18 (1989) 389-396
-
(1989)
Sens Actuators Phys A
, vol.18
, pp. 389-396
-
-
Tiren, J.1
Tenerz, L.2
Hök, B.3
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