A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response

Comptes Rendus - Mecanique

Volumn 332, Issue 2, 2004, Pages 141-146

  Ettouhami, Aziz ^a   Zahid, Noureddine ^a   Elbelkacemi, Mourad ^a  

^a FACULTÉ DES SCIENCES   (Morocco)

Author keywords

Capacitive pressure sensor; Control; Linearity; Sensitivity

Indexed keywords

CAPACITOR; PRESSURE TRANSDUCER;

ARTICLE; MATHEMATICAL COMPUTING; MECHANICS; PRESSURE; SENSITIVITY ANALYSIS; SENSOR; TRANSDUCER;

EID: 11144308034     PISSN: 16310721     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.crme.2003.10.001     Document Type: Article

References (18)

1. Y.S. Lee, K.D. Wise, A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity, IEEE Trans. Electron Devices ED-29 (1) (1982) 42-48.
2. W.H. Ko, M.H. Bao, Y.D. Hong, A high-sensitivity integrated-circuit capacitive pressure transducer, IEEE Trans. Electron Devices ED-29 (1) (1982) 48-56.
3. S. Timoshenko, S. Woinowsky-Krieger, Theory of Plates and Shells, McGraw-Hill, New York, 1959.
4. A. Essaid, A. Ettouhami, M. Kerouad, M. Limouri, Contribution to study of capacitive pressure sensors, in: Eurosensors, Cambridge, 22-24 September 1987, England.
5. A. Ettouhami, Modélisation, Intégrabilité et limites de fonctionnement d'un capteur de pression capacitif, Thesis 1987, Faculty of Sciences, Rabat, Maroc.
6. C.S. Sander, J.W. Knutti, J.B. Angell, A monolithic capacitive pressure sensor with pulse-period output, IEEE Trans. Electron Devices ED-27 (1980) 927.
7. A. Hanneborg, T.E. Hansen, P.A. Ohlkers, E. Carlson, B. Dahl, O. Holwech, An integrated capacitive pressure sensor with frequency-modulated output, Sensors and Actuators 9 (1986) 345-351.
8. A. Jurnod, F. Rudolf, High-precision capacitive absolute pressure sensor, Sensors and Actuators 17 (1989) 415-421.
9. W.H. Ko, Solid state capacitive pressure transducers, Sensors and Actuators 10 (1986) 303-320.
10. H. L. Chau, K.D. Wise, Scaling limits in batch-fabricated silicon pressure sensors, IEEE Trans. Electron Devices ED-34 (1987) 850-858.
11. A.A. Elimrani, A. Ettouhami, M. Limouri, A. Essaid, Conception et simulation d'un convertisseur C-V associé au capteur capacitif microélectronique, in: Colloque international «Du capteur à l'instrumentation», Université Mohamed V, Faculté des sciences, Rabat, Maroc, 26-28 Avril 1992.
12. L. Rosengren, J. Söderkvist, A novel method of achieving linear response in capacitive pressure sensors, in: Proc. MME 90, FRG, Berlin, 1990, pp. 235-240.
13. J.H. Jerman, The fabrication and use of micromachined corrugated silicon diaphragms, Sensors and Actuators A21-A23 (1990) 988-992.
14. J.R. Mallon, J.F. Pourahmadi, K. Petrsen, P. Barth, T. Vermeulen, J. Bryzek, Low-pressure sensors employing bossed diaphragms and precision etch-stopping, Sensors and Actuators A21, A23 (1990) 89-95.
15. L. Rosengren, J. Söderkvist, L. Smith, Micromachined sensor structures with linear capacitive response, Sensors and Actuators A31 (1992) 200-205.
16. M.H. Bao, L.Z. Yu, Y. Wang, Micromachined beam-diaphragm structure improves performances of pressure transducer, Sensors and Actuators A21, A23 (1990) 137-141.
17. J.H. Jerman, The fabrication and use of micromachined corrugated silicon diaphragms, Sensors and Actuators A21, A23 (1990) 988-992.
18. A. Ettouhami, Contribution à l'étude statique et thermique du capteur de pression capacitif microélectronique, Thesis 1997, Faculty of Sciences, Rabat, Maroc.