Ultraminiature silicon capacitive pressure-sensing elements obtained by silicon fusion bonding

Sensors and Actuators, A: Physical

Volumn 68, Issue 1-3, 1998, Pages 269-274

  Goustouridis, Dimitris ^a   Normand, Pascal ^a   Tsoukalas, Dimitris ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

Author keywords

Blood pressure measurements; Capacitive type pressure sensors; Fusion bonding; Silicon

Indexed keywords

ARRAY CONFIGURATION; SILICON FUSION BONDING; ULTRAMINIATURE SILICON CAPACITIVE PRESSURE SENSING ELEMENTS;

FABRICATION; ION IMPLANTATION; MASKS; MEDICAL APPLICATIONS; SILICON SENSORS;

PARTIAL PRESSURE SENSORS;

EID: 0043139060     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00016-8     Document Type: Article

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