Modelling and analysis of MEMS sensor based on piezoresistive effects

Materials Science and Engineering C

Volumn 27, Issue 4, 2007, Pages 691-694

  Kaabi, L ^a   Kaabi, A ^a   Sakly, J ^a   AbdelMalek, F ^a  

^a UNIVERSITY OF CARTHAGE   (Tunisia)

Author keywords

Capacitance; MEMS; Modelling; Pressure; Sensors

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; FLOW OF GASES; MICROSENSORS; PARAMETER ESTIMATION; PIEZOELECTRICITY;

AIR BASED SENSOR; PIEZORESISTIVE EFFECTS;

MEMS;

EID: 34247189208     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2006.06.022     Document Type: Review

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