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Volumn 46, Issue 6, 2014, Pages 407-417

Nondestructive compositional depth profiling using variable-kinetic energy hard X-ray photoelectron spectroscopy and maximum entropy regularization

(6) Weiland, C a Krajewski, J b Opila, R b Pallem, V c Dussarrat, C c Woicik, J C a

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

b UNIVERSITY OF DELAWARE (United States)

c Delaware Research and Technology Center (United States)

Author keywords

compositional depth profiles; HAXPES; maximum entropy

Indexed keywords

KINETIC ENERGY; KINETICS; PHOTOELECTRONS; SILICON; TITANIUM DIOXIDE; X RAY PHOTOELECTRON SPECTROSCOPY; X RAYS;

COMPOSITIONAL DEPTH PROFILE; COMPOSITIONAL DEPTH PROFILING; HARD X-RAY PHOTOELECTRON SPECTROSCOPY; HAX-PES; INTERFACIAL INTERMIXING; KINETIC ENERGY SPECTRA; REGULARIZATION FUNCTION; REGULARIZATION TECHNIQUE;

MAXIMUM ENTROPY METHODS;

EID: 84900016162 PISSN: 01422421 EISSN: 10969918 Source Type: Journal
DOI: 10.1002/sia.5517 Document Type: Article

Times cited : (12)

References (19)

1
- 0026120277
- S. Tougaard, H. Hansen, M. Neumann, Surf. Sci. 1991, 244, 125.
- (1991) Surf. Sci. , vol.244 , pp. 125
- Tougaard, S.¹ Hansen, H.² Neumann, M.³

2
- 0000944801
- J. P. Chang, M. L. Green, V. M. Donnelly, R. L. Opila, J. Eng, J. Sapjeta, P. J. Silverman, B. Weir, H. C. Lu, T. Gustafsson, E. Garfunkel, J. Appl. Phys. 2000, 87, 4449.
- (2000) J. Appl. Phys. , vol.87 , pp. 4449
- Chang, J.P.¹ Green, M.L.² Donnelly, V.M.³ Opila, R.L.⁴ Eng, J.⁵ Sapjeta, J.⁶ Silverman, P.J.⁷ Weir, B.⁸ Lu, H.C.⁹ Gustafsson, T.¹⁰ Garfunkel, E.¹¹

3
- 70350335590
- A. Herrera-Gomez, J. T. Grant, P. J. Cumpson, M. Jenko, F. S. Aguirre-Tostado, C. R. Brundle, T. Conard, G. Conti, C. S. Fadley, J. Fulghum, K. Kobayashi, L. Kövér, H. Nohira, R. L. Opila, S. Oswald, R. W. Paynter, R. M. Wallace, W. S. M. Werner, J. Wolstenholme, Surf. Interface Anal. 2009, 41, 840.
- (2009) Surf. Interface Anal. , vol.41 , pp. 840
- Herrera-Gomez, A.¹ Grant, J.T.² Cumpson, P.J.³ Jenko, M.⁴ Aguirre-Tostado, F.S.⁵ Brundle, C.R.⁶ Conard, T.⁷ Conti, G.⁸ Fadley, C.S.⁹ Fulghum, J.¹⁰ Kobayashi, K.¹¹ Kövér, L.¹² Nohira, H.¹³ Opila, R.L.¹⁴ Oswald, S.¹⁵ Paynter, R.W.¹⁶ Wallace, R.M.¹⁷ Werner, W.S.M.¹⁸ Wolstenholme, J.¹⁹

4
- 77954558277
- E. H. Lock, D. Y. Petrovykh, P. Mack, T. Carney, R. G. White, S. G. Walton, R. F. Fernsler, Langmuir 2010, 26, 8857.
- (2010) Langmuir , vol.26 , pp. 8857
- Lock, E.H.¹ Petrovykh, D.Y.² Mack, P.³ Carney, T.⁴ White, R.G.⁵ Walton, S.G.⁶ Fernsler, R.F.⁷

5
- 34250179854
- R. W. Paynter, D. Roy-Guay, Plasma Processes Polym. 2007, 4, 406.
- (2007) Plasma Processes Polym. , vol.4 , pp. 406
- Paynter, R.W.¹ Roy-Guay, D.²

6
- 0036131799
- R. L. Opila, J. Eng Jr, Prog. Surf. Sci. 2002, 69, 125.
- (2002) Prog. Surf. Sci. , vol.69 , pp. 125
- Opila, R.L.¹ Eng, Jr.J.²

7
- 84865152478
- C. Weiland, P. Lysaght, J. Price, J. Huang, J. C. Woicik, Appl. Phys. Lett. 2012, 101, 061602.
- (2012) Appl. Phys. Lett. , vol.101 , pp. 061602
- Weiland, C.¹ Lysaght, P.² Price, J.³ Huang, J.⁴ Woicik, J.C.⁵

8
- 44649201258
- J. Rubio-Zuazo, G. R. Castro, J. Phys. Conf. Ser. 2008, 100, 012042.
- (2008) J. Phys. Conf. Ser , vol.100 , pp. 012042
- Rubio-Zuazo, J.¹ Castro, G.R.²

9
- 55649120496
- J. Rubio-Zuazo, G. R. Castro, Surf. Interface Anal. 2008, 40, 1438.
- (2008) Surf. Interface Anal. , vol.40 , pp. 1438
- Rubio-Zuazo, J.¹ Castro, G.R.²

10
- 33751399490
- M. Zier, S. Oswald, R. Reiche, K. Wetzig, Microchim. Acta 2006, 156, 99.
- (2006) Microchim. Acta , vol.156 , pp. 99
- Zier, M.¹ Oswald, S.² Reiche, R.³ Wetzig, K.⁴

11
- 0028444677
- A. K. Livesey, G. C. Smith, J. Electron Spec. Relat. Phenom. 1994, 67, 439.
- (1994) J. Electron Spec. Relat. Phenom. , vol.67 , pp. 439
- Livesey, A.K.¹ Smith, G.C.²

12
- 79952004023
- R. W. Paynter, M. Rondeau, J. Electron Spec. Relat. Phenom. 2011, 184, 43.
- (2011) J. Electron Spec. Relat. Phenom. , vol.184 , pp. 43
- Paynter, R.W.¹ Rondeau, M.²

13
- 34247500374
- T. E. Oliphant, Comput. Sci. Eng. 2007, 9, 10.
- (2007) Comput. Sci. Eng. , vol.9 , pp. 10
- Oliphant, T.E.¹

14
- 0036606237
- A. Jablonski, C. J. Powell, Surf. Sci. Rep. 2002, 47, 33.
- (2002) Surf. Sci. Rep. , vol.47 , pp. 33
- Jablonski, A.¹ Powell, C.J.²

15
- 84860315419
- National Institute Of Standards And Technology, Gaithersburg, MD.
- C. J. Powell, A. Jablonski, NIST Electron Inelastic-Mean-Free-Path Database, National Institute Of Standards And Technology, Gaithersburg, MD, 2010.
- (2010) NIST Electron Inelastic-Mean-Free-Path Database
- Powell, C.J.¹ Jablonski, A.²

16
- 0026817475
- Y. F. Chen, C. M. Kwei, C. J. Tung, J. Phys. D Appl. Phys. 1992, 25, 262.
- (1992) J. Phys. D Appl. Phys. , vol.25 , pp. 262
- Chen, Y.F.¹ Kwei, C.M.² Tung, C.J.³

17
- 0003459529
- Perkin Elmer Corp, Minneapolis, MN, USA.
- J. F. Moulder, W. F. W. Stickle, P. E. Sobol, K. D. Bomben, Handbook of X-ray Photoelectron Spectroscpy, Perkin Elmer Corp, Minneapolis, MN, USA, 1978.
- (1978) Handbook of X-ray Photoelectron Spectroscpy
- Moulder, J.F.¹ Stickle, W.F.W.² Sobol, P.E.³ Bomben, K.D.⁴

18
- 0003139802
- M. B. Trzhaskovskaya, V. I. Nefedov, V. G. Yarzhemsky, At. Data Nucl. Data Tables 2001, 77, 97.
- (2001) At. Data Nucl. Data Tables , vol.77 , pp. 97
- Trzhaskovskaya, M.B.¹ Nefedov, V.I.² Yarzhemsky, V.G.³

19
- 0036872984
- M. B. Trzhaskovskaya, V. I. Nefedov, V. G. Yarzhemsky, At. Data Nucl. Data Tables 2002, 82, 257.
- (2002) At. Data Nucl. Data Tables , vol.82 , pp. 257
- Trzhaskovskaya, M.B.¹ Nefedov, V.I.² Yarzhemsky, V.G.³

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