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Volumn 146, Issue 3, 2014, Pages 425-430

Single and multilayered a-SiOx:H (x < 1) thin film samples analyzed by optical absorption and small-angle X-ray scattering

(3) Bacioǧlu, Akin a Kazan, Ural a Ide, Semra a

a HACETTEPE UNIVERSITY (Turkey)

Author keywords

Alloys; Amorphous materials; Multilayers; Oxides; Small angle scattering

Indexed keywords

ALLOYING; AMORPHOUS MATERIALS; CARBON DIOXIDE; MULTILAYERS; OXIDES; OXYGEN; X RAY SCATTERING;

ALLOY THIN FILMS; CRYSTALLINE SILICON SUBSTRATES; MULTI-LAYERED; NANOSTRUCTURAL; OPTICAL CHARACTERIZATION; OXYGEN CONTENT; SMALL ANGLE X-RAY SCATTERING; SMALL-ANGLE SCATTERING;

FILM PREPARATION;

EID: 84899937159 PISSN: 02540584 EISSN: None Source Type: Journal
DOI: 10.1016/j.matchemphys.2014.03.048 Document Type: Article

Times cited : (2)

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