Plasma deposition of n-SiOx nanocrystalline thin film for enhancing the performance of silicon thin film solar cells

Thin Solid Films

Volumn 520, Issue 2, 2011, Pages 684-688

  Zhang, X D ^a   Yue, Q ^a   Zheng, X X ^a   Geng, X H ^a   Zhao, Y ^a  

^a NANKAI UNIVERSITY   (China)

Author keywords

Amorphous silicon; Light trapping; n SiOx; Plasma enhanced chemical vapor deposition; Solar cells

Indexed keywords

A-SI:H; AMORPHOUS SILICON (A-SI:H); BACK REFLECTORS; BOTTOM CELLS; CURRENT MATCHING; DEPOSITION PARAMETERS; INTRINSIC LAYER THICKNESS; LIGHT TRAPPING; N-SIOX; NANOCRYSTALLINE THIN FILMS; SILICON THIN FILM; SINGLE LAYER; SOLAR CELL PERFORMANCE; SPECTRAL RESPONSE; TANDEM SOLAR CELLS; WAVELENGTH RANGES;

ALUMINUM; AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; DEPOSITION; MATERIALS PROPERTIES; NANOCRYSTALLINE SILICON; NANOSTRUCTURED MATERIALS; OPEN CIRCUIT VOLTAGE; OPTIMIZATION; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFLECTION; SEMICONDUCTING SILICON COMPOUNDS; SILICON OXIDES; THIN FILMS;

AMORPHOUS SILICON;

EID: 80755133538     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.06.068     Document Type: Conference Paper

References (27)

1. J. Müller, B. Rech, J. Springer, and M. Vanecek Sol. Energy 77 2004 917
2. S. Faÿ, S. Dubail, U. Kroll, J. Meier, Y. Ziegler, and A. Shah Proceedings of the 16th European Photovoltaic Solar Energy Conference, Glasgow UK 2000 361
3. M. Kambe, M. Fukawa, N. Taneda, Y. Yoshikawa, K. Sato, K. Ohki, S. Hiza, A. Yamada, and M. Konagai Proceeding of the WCPEC-3, Osaka Japan 2003 1812
4. Jonas Malmström, Sebastian Schleussner, and Lars Stolt Appl. Phys. Lett. 85 2004 2634
5. J. Springer, B. Rech, W. Reetz, J. Müller, and M. Vanecek Sol. Energy Mater. Sol. Cells 85 2005 1
6. X.D. Zhang, Y. Zhao, Y.T. Gao, F. Zhu, C.C. Wei, X.L. Chen, J. Sun, G.F. Hou, X.H. Geng, and S.Z. Xiong J. Non-Cryst. Solids 352 2006 1863
7. A. Banerjee, D. Wolf, J. Yang, and S. Guha J. Appl. Phys. 70 1991 1692
8. Hitoshi Sai, Hiroyuki Fujiwara, Michio Kondo, and Yoshiaki Kanamori Appl. Phys. Lett. 93 2008 143501
9. L. Zeng, P. Bermel, Y. Yi, B.A. Alamariu, K.A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L.C. Kimerling Appl. Phys. Lett. 93 2008 221105-1-3
10. J. Krc, M. Zeman, S.L. Luxembourg, and M. Topic Appl. Phys. Lett. 94 2009 153501
11. D. Fischer, S. Dubail, J.A.A. Selvan, N.P. Vaucher, R. Platz, C.H. Hof, U. Kroll, J. Meier, P. Torres, H. Keppner, N. Wyrsch, M. Goetz, A. Shah, and K. Ufert Proceedings of 25th IEEE photovoltaic Specialists Conference Washington DC, U.S.A., May 13-17 1996 1053
12. K. Tabuchi, W.W. Wenas, A. Yamada, M. Konagai, and K. Takahashi Jpn. J. Appl. Phys. 32 1993 3764
13. S. Faÿ, L. Feitknecht, R. Schluchter, U. Kroll, E. Vallat-Sauvain, and A. Shah Sol. Energy Mater. Sol. Cells 90 2006 2960
14. W.W. Wenas, A. De, A. Yamada, M. Konagai, and K. Takahashi Sol. Energy Mater. Sol. Cells 34 1994 313
15. A. Banerjee, and S. Guha J. Appl. Phys. 69 1991 1030
16. R. Groenen, J. Loeffler, P.M. Sommeling, J.L. Linden, E.A.G. Hamers, R.E.I. Schropp, and M.C.M. Sanden Thin Solid Films 392 2001 226
17. O. Kluth, G. Scope, J. Hupkes, C. Agashe, J. Muller, and B. Rech Thin Solid Films 442 2003 80
18. Bose Subhasis, and A.K. Barua J. Phys. D: Appl. Phys 32 1999 213
19. G.E. Jellison Jr., and F.A. Modine Appl. Phys. Lett. 69 1996 371
20. D. Das, M. Jana, and A.K. Barua Sol. Energy Mater. Sol. Cells 63 2000 285
21. Y. Matsumoto, F. Meléndez, and R. Asomoza Sol. Energy Mater. Sol. Cells 66 2001 163
22. R. Janssen, A. Janotta, D. Dimova-Malinovska, and M. Stutzmann Phys. Rev. B 60 1999 13561
23. A.M.K. Dagamseh, B. Vet, F.D. Tichelaar, P. Sutta, and M. Zeman Thin Solid Films 516 2008 7844
24. J. Morris, R.R. Arya, J.G. O'Dowd, and S. Wiedemann J. Appl. Phys. 67 1990 1079
25. H. Stiebig, A. Kresiel, K. Winz, N. Schultz, C. Beneking, Th Eickhoff, and H. Wagner Proceedings of the 1st World Conference on Photovoltaic Solar Energy Conversion, Hawaii 1994 603
26. M. Despeisse, G. Bugnon, A. Feltrin, M. Stueckelberger, P. Cuony, F. Meillaud, A. Billet, and C. Ballif Appl. Phys. Lett. 96 2010 073507
27. P.O. Grabitz, U. Rau, and J.H. Werner Phys. Status Solidi A 202 2005 2920