Dynamic analysis of mems resonators under primary-resonance excitation

Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005

Volumn 1 A, Issue , 2005, Pages 397-404

  Nayfeh, Ali H ^a   Younis, Mohammad I ^b   Abdel Rahman, Eihab M ^a  

^a Virginia Polytechnic Institute and State University   (United States)

^b State University of New York   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC EXCITATION; EQUATIONS OF MOTION; MICROELECTROMECHANICAL DEVICES; PERTURBATION TECHNIQUES; RESONANCE;

HOMOCLINIC TANGLING; MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS; PULL-IN INSTABILITY; SADDLE-NODE BIFURCATION;

RESONATORS;

EID: 33144475800     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/detc2005-84146     Document Type: Conference Paper

References (9)

1. E. M. Abdel-Rahman, M. I. Younis, and A. H. Nayfeh, "Characterization of the mechanical behavior of an electrically actuated microbeam," J. Micromech. and Microeng., Vol. 12, pp. 795-766, 2002.
2. H. A. Tilmans and R. Legtenberg, "Electrostatically driven vacuum-encapsulated polysilicon resonators. Part II. Theory and performance," Sens. Actuators, Vol. A45, pp. 67-84, 1994.
3. M. I. Younis and A. H. Nayfeh, "A study of the non-linear response of a resonant microbeam to an electric actuation," Nonlinear Dynamics, Vol. 31, pp. 91-117, 2003.
4. G. K. Ananthasuresh, R. K. Gupta, and S. D. Senturia, "An approach to macromodeling of MEMS for nonlinear dynamic simulation," in Proc. ASME Inter. Conf. Mechan. Engn. Congress and Exposition (MEMS), pp. 401-407, 1996.
5. S. Krylov and R. Maimon, "Pull-in dynamics of an elastic beam actuated by distributed electrostatic force," in Proc. 19th Biennial Conference in Mechanical Vibration and Noise (VIB), paper DETC2003/VIB-48518, 2003.
6. J. I. Seeger and B. E. Boser, "Parallel-plate driven oscillations and resonant pull-in," in Proc. Solid-State Sensor, Actuator and Microsystems Workshop, pp. 313-316, 2002.
7. M. I. Younis, E. M. Abdel-Rahman, and A. H. Nayfeh, "A reduced-order model for electrically actuated microbeam-based MEMS," J. Micromech. and Microeng., Vol. 12, pp. 672-680, 2003.
8. A. H. Nayfeh and B. Balachandran, Applied Nonlinear Dynamics. New York: Wiley, 1995.
9. A. H. Nayfeh and N. E. Sanchez, "Chaos and dynamic instability in the rolling motion of ships," in Proc. 17th Symposium on Naval Hydrodynamics, pp. 617-631, 1988.