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MRS Bulletin

Volumn 39, Issue 4, 2014, Pages 361-365

Focused ion beam and scanning electron microscopy for 3D materials characterization

(3) Kotula, Paul G a Rohrer, Gregory S b Marsh, Michael P c

a SANDIA NATIONAL LABORATORIES (United States)

b CARNEGIE MELLON UNIVERSITY (United States)

c Marsh Imaging and Visualization ^* (United States)

Author keywords

Chemical composition; Crystallographic structure; Ion solid interactions; Scanning electron microscopy (SEM)

Indexed keywords

CHEMICAL ANALYSIS; DATA PROCESSING; FOCUSED ION BEAMS; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL;

CHEMICAL COMPOSITIONS; CRYSTALLOGRAPHIC STRUCTURE; DATA INTERPRETATION; ELECTRON BACK SCATTER DIFFRACTION; ION-SOLID INTERACTIONS; MATERIALS CHARACTERIZATION; TECHNOLOGICAL ADVANCES; X-RAY ENERGY DISPERSIVE SPECTROMETRY;

CHARACTERIZATION;

EID: 84898482758 PISSN: 08837694 EISSN: None Source Type: Journal
DOI: 10.1557/mrs.2014.55 Document Type: Article

Times cited : (32)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.