Block lift-out sample preparation for 3D experiments in a dual beam focused ion beam microscope

Microchimica Acta

Volumn 161, Issue 3-4, 2008, Pages 421-425

  Schaffer, Miroslava ^a   Wagner, Julian ^a  

^a GRAZ UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

3D microanalysis; Block lift out; EDXS; FIB; Sample preparation

Indexed keywords

EID: 44349090326     PISSN: 00263672     EISSN: 14365073     Source Type: Journal    
DOI: 10.1007/s00604-007-0853-5     Document Type: Conference Paper

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