Automated analysis of SEM X-ray spectral images: A powerful new microanalysis tool

Microscopy and Microanalysis

Volumn 9, Issue 1, 2003, Pages 1-17

  Kotula, Paul G ^a   Keenan, Michael R ^a   Michael, Joseph R ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Information extraction; Multivariate statistical analysis; Principal components analysis; Spectral image; Spectrum image; Statistical analysis; X ray microanalysis

Indexed keywords

COPPER; METAL; NICKEL;

ARTICLE; CERAMICS; CHEMISTRY; DIFFUSION; ELECTRON PROBE MICROANALYSIS; IMAGE PROCESSING; METHODOLOGY; MULTIVARIATE ANALYSIS; PARTICLE SIZE; PRINCIPAL COMPONENT ANALYSIS; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPY; STATISTICS; X RAY;

CERAMICS; COPPER; DIFFUSION; ELECTRON PROBE MICROANALYSIS; IMAGE PROCESSING, COMPUTER-ASSISTED; METALS; MICROSCOPY, ELECTRON, SCANNING; MULTIVARIATE ANALYSIS; NICKEL; PARTICLE SIZE; PRINCIPAL COMPONENT ANALYSIS; SPECTRUM ANALYSIS; X-RAYS;

EID: 0037326065     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927603030058     Document Type: Article

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