Tomographic spectral imaging with a dual-beam FIB/SEM: 3D microanalysis

Microscopy and Microanalysis

Volumn 10, Issue SUPPL. 2, 2004, Pages 1132-1133

  Kotula, P G ^a   Keenan, M R ^a   Michael, J R ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4544358469     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927604880619     Document Type: Conference Paper

References (5)

1. P.O. Kotula, M.R. Keenan, and J.R. Michael, Microsc. Microanal. 9 (2003) 1-17.
2. P.G. Kotula, M.R. Keenan, and J.R. Michael, Microsc. Microanal. 9 (Suppl. 2) (2003) 1004.
3. T. Sakamoto et al., Jpn. J. Appl. Phys. 37 (1998) 2051-2056.
4. D.N. Dunn and R. Hull, Appl. Phys. Lett. 75 (1999) 3414-3416.
5. Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United Stated Department of Energy (DOE) under contract DE-AC0494AL85000.