Methacrylate-based polymer films useful in lithographic applications exhibit different glass transition temperature-confinement effects at high and low molecular weight

Polymer

Volumn 55, Issue 5, 2014, Pages 1249-1258

  Lan, Tian ^a   Torkelson, John M ^a  

^a Northwestern University   (United States)

Author keywords

Confinement effects; Glass transition temperature; Polymer thin films

Indexed keywords

ELLIPSOMETRY; ESTERS; FILM PREPARATION; FLUORESCENCE; GLASS; GLASS TRANSITION; MOLECULAR WEIGHT; MULTILAYER FILMS; PHOTORESISTS; SEMICONDUCTING FILMS; SILICA; TEMPERATURE; THIN FILMS;

CONFINEMENT EFFECTS; FLUORESCENCE STUDIES; LOW MOLECULAR WEIGHT; METHACRYLATE POLYMERS; NANOSCALE THICKNESS; POLY(METHYL METHACRYLATE) (PMMA); POLYMER THIN FILMS; POLYSTYRENE FILMS;

POLYMER FILMS;

EID: 84896696129     PISSN: 00323861     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.polymer.2014.01.031     Document Type: Article

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