SCOPUS 정보 검색 플랫폼

Microsystem Technologies

Volumn 20, Issue 3, 2014, Pages 451-456

Microfabrication of thin film temperature sensor for cryogenic measurement

(5) Jiang, Shui Dong a,b Liu, Jing Quan a,b Yang, Bin a,b Zhu, Hong Ying a,b Yang, Chun Sheng a,b

a National Key Laboratory of Science and Technology on Nano/Micro Fabrication Technology (China)

b SHANGHAI JIAO TONG UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENICS; ELECTRIC PROPERTIES; TEMPERATURE; THIN FILMS; X RAY DIFFRACTION;

ALTERNATING CURRENT; CRYOGENIC ENGINEERING; CRYOGENIC MEASUREMENT; MAXIMUM RESISTANCES; MICRO-FABRICATION TECHNOLOGY; TEMPERATURE COEFFICIENT RESISTANCE; THERMAL CYCLE STABILITIES; THIN FILM TEMPERATURE SENSORS;

SENSORS;

EID: 84896393595 PISSN: 09467076 EISSN: None Source Type: Journal
DOI: 10.1007/s00542-013-1982-x Document Type: Article

Times cited : (9)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.