Characterization of integrated thin film Pt heater and temperature sensors on Si platform

IECON Proceedings (Industrial Electronics Conference)

Volumn , Issue , 2009, Pages 4014-4019

  Resnik, Drago ^a   Vrtacnik D ^a   Aljancic U ^a   Mozek M ^a   Pecar B ^a   Penic S ^a   Amon, S ^a  

^a UNIVERSITY OF LJUBLJANA   (Slovenia)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING TEMPERATURES; COMPARATIVE STUDIES; DC SPUTTERING; DEPOSITED LAYER; ELECTRICAL PROPERTY; FABRICATION METHOD; FABRICATION PROCESS; NEW APPROACHES; POWER CONSUMPTION; PYREX GLASS; RESISTIVE HEATERS; TEMPERATURE COEFFICIENT OF RESISTANCE; TEMPERATURE SENSING;

ELECTRIC PROPERTIES; FABRICATION; HEAT RESISTANCE; INDUSTRIAL ELECTRONICS; PLATINUM; TEMPERATURE SENSORS; THERMAL INSULATION; THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77951585507     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IECON.2009.5415344     Document Type: Conference Paper

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