Fabrication of micro sensors on a flexible substrate

Sensors and Actuators, A: Physical

Volumn 147, Issue 1, 2008, Pages 173-176

  Lee, Chi Yuan ^a   Wu, Guan Wei ^a   Hsieh, Wei Jung ^a  

^a YUAN ZE UNIVERSITY   (Taiwan)

Author keywords

Flexible substrate; Humidity sensor; Parylene; Temperature sensor

Indexed keywords

DETECTORS; GOLD; MICROSENSORS; MOISTURE; OPTICAL DESIGN; POLYMERS; SOLIDS; THICK FILMS; THIN FILMS; VAPOR DEPOSITION;

(E ,3E) PROCESS; FLEXIBLE SUBSTRATES; GOLD WIRES; MICRO ELECTRO MECHANICAL SYSTEMS (MEMS); MICRO SENSORS; PARYLENE; POLY-IMIDE FILMS;

SENSORS;

EID: 47649131551     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.05.004     Document Type: Article

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