Microscaled and nanoscaled platinum sensors

Applied Physics Letters

Volumn 97, Issue 13, 2010, Pages

  Rajagopal, Aditya ^a   Walavalkar, Sameer ^a   Chen, Samson ^a   Guo, Luke ^a   Gwinn, Tom ^a   Scherer, Axel ^a  

^a California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT EMITTERS; LOCALIZED HEATING; MICRO-LITHOGRAPHY; MICROFABRICATED; NANOSCALED; PLATINUM RESISTORS; PLATINUM SENSOR; POTENTIAL APPLICATIONS; RESISTIVE HEATERS; SILICON SUBSTRATES; THERMAL SENSORS; THERMAL SOURCE; WIRE WIDTH;

RESISTORS; SENSOR ARRAYS;

PLATINUM;

EID: 77957675869     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3494088     Document Type: Article

References (18)

1. S. Semancik and R. Cavicchi, Acc. Chem. Res. ACHRE4 0001-4842 31, 279 (1998). 10.1021/ar970071b
2. I. Simon, N. Barson, M. Bauer, and U. Weimar, Sens. Actuators B SABCEB 0925-4005 73, 1 (2001). 10.1016/S0925-4005(00)00639-0 (Pubitemid 32874436)
3. P. M. Sarro, A. W. van Herwaarden, and W. van der Vlist, Sens. Actuators, A SAAPEB 0924-4247 42, 666 (1994). 10.1016/0924-4247(94)80072-3
4. J. Yeom, C. R. Field, B. Bae, R. I. Masel, and M. A. Shannon, J. Micromech. Microeng. JMMIEZ 0960-1317 18, 125001 (2008). 10.1088/0960-1317/18/ 12/125001
5. C. Zhang and D. Xing, Nucleic Acids Res. NARHAD 0305-1048 35, 4223 (2007). 10.1093/nar/gkm389 (Pubitemid 47244579)
6. C. Rossi, D. Briand, M. Dumonteuil, T. Camps, P. Q. Pham, and N. F. de Rooij, Sens. Actuators, A SAAPEB 0924-4247 126, 241 (2006). 10.1016/j.sna.2005. 08.024 (Pubitemid 43120354)
7. J. Courbat, D. Briand, and N. F. de Rooij, Sens. Actuators, A SAAPEB 0924-4247 142, 284 (2008). 10.1016/j.sna.2007.04.006 (Pubitemid 351199568)
8. M. D. Henry, S. Walavalkar, A. Homyk, and A. Scherer, Nanotechnology NNOTER 0957-4484 20, 255305 (2009). 10.1088/0957-4484/20/25/255305
9. CRC Handbook of Chemistry and Physics, edited by, R. Weast, (CRC, Boca Raton, 1983), p. F-125.
10. CRC Handbook of Chemistry and Physics, edited by, R. Weast, (CRC, Boca Raton, 2001), p. F-110.
11. C. H. Mastrangelo and R. S. Muller, Proceedings of the International Electron Devices Meeting, 1989.
12. P. Furjes, C. Dusco, M. Adam, J. Zeettner, and I. Barsony, Superlattices Microstruct. SUMIEK 0749-6036 35, 455 (2004). 10.1016/j.spmi.2003.09.007
13. J. El-Ali, I. R. Perch-Nielsen, C. R. Poulsen, D. D. Bang, P. Telleman, and A. Wolff, Sens. Actuators, A SAAPEB 0924-4247 110, 3 (2004). 10.1016/j.sna.2003.09.022
14. D. Briand, S. Heimgartner, M. A. Gretillat, B. van der Schoot, and N. F. de Rooij, J. Micromech. Microeng. JMMIEZ 0960-1317 12, 971 (2002). 10.1088/0960-1317/12/6/330 (Pubitemid 35369267)
15. S. H. Kong, D. D. L. Wijngaards, and R. F. Wolffenbuttel, Sens. Actuators, A SAAPEB 0924-4247 92, 88 (2001). 10.1016/S0924-4247(01)00544-1 (Pubitemid 32697882)
16. A. Nitkowski and M. Lipson, Proceedings of the Conference on Lasers and Electro-Optics, 2008.
17. B. Fischer, A. Behrends, D. Freund, D. F. Lupton, and J. Merker, Platinum Met. Rev. PTMRA3 0032-1400 43, 18 (1999).
18. W. E. Forsythe and E. Q. Adams, J. Opt. Soc. Am. JOSAAH 0030-3941 35, 108 (1945). 10.1364/JOSA.35.000108