Hard and soft multilayered sicn nanocoatings with high hardness and toughness

Journal of Nanomaterials

Volumn 2013, Issue , 2013, Pages

  Mishra, S K ^a   Verma, Devraj ^a   Bysakh, S ^b   Pathak, L C ^a  

^a NATIONAL METALLURGICAL LABORATORY   (India)

^b CSIR CENTRAL GLASS AND CERAMIC RESEARCH INSTITUTE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

HARD COATINGS; MAGNETRON SPUTTERING;

ELASTIC RECOVERY; FRACTURE TOUGHNESS VALUES; HARDNESS AND MODULUS; HIGH HARDNESS AND TOUGHNESS; LOW MODULUS; MULTI-LAYERED; NANO-COATINGS; TRILAYER FILM;

HARDNESS;

EID: 84896108907     PISSN: 16874110     EISSN: 16874129     Source Type: Journal    
DOI: 10.1155/2013/949416     Document Type: Article

References (21)

1. Hutchinson J. W., Suo Z., Mixed mode cracking in layered materials. Advances in Applied Mechanics 1991 29 63 191 2-s2.0-71149121504 10.1016/S0065-2156(08)70164-9
2. Gell M., Application opportunities for nanostructured materials and coatings. Materials Science & Engineering A 1995 204 1-2 246 251 2-s2.0-0029515756
3. Zhang S., Wang H. L., Ong S.-E., Sun D., Bui X. L., Hard yet tough nanocomposite coatings-present status and future trends. Plasma Processes and Polymers 2007 4 3 219 228 2-s2.0-34248374180 10.1002/ppap.200600179 (Pubitemid 46736284)
4. Griffith A. A., The phenomena of rupture and flows in solids. Philosophical Transactions of the Royal Society A 1921 221 163 197
5. Vepřek S., Conventional and new approaches towards the design of novel superhard materials. Surface and Coatings Technology 1997 97 1-3 15 22 2-s2.0-0031347180 (Pubitemid 127442601)
6. Stueber M., Holleck H., Leiste H., Seemann K., Ulrich S., Ziebert C., Concepts for the design of advanced nanoscale PVD multilayer protective thin films. Journal of Alloys and Compounds 2009 483 1-2 321 333 2-s2.0-69249232548 10.1016/j.jallcom.2008.08.133
7. Wang E. G., Research on Carbon nitrides. Progress in Materials Science 1997 41 5 241 298 2-s2.0-0031295275 (Pubitemid 127427164)
8. Leyland A., Matthews A., On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behaviour. Wear 2000 246 1-2 1 11 2-s2.0-0034324823 10.1016/S0043-1648(00)00488-9
9. Ding J., Meng Y., Wen S., Mechanical properties and fracture toughness of multilayer hard coatings using nanoindentation. Thin Solid Films 2000 371 1 178 182 2-s2.0-0033719549 10.1016/S0040-6090(00)01004-X
10. Seifert H. J., Peng J., Lukas H. L., Aldinger F., Phase equilibria and thermal analysis of Si-C-N ceramics. Journal of Alloys and Compounds 2001 320 2 251 261 2-s2.0-0035942814 10.1016/S0925-8388(00)01478-X (Pubitemid 32406804)
11. Blaszczyk-Lezak I., Wrobel A. M., Kivitorma M. P. M., Vayrynen I. J., Tracz A., Silicon carbonitride by remote microwave plasma CVD from organosilicon precursor: growth mechanism and structure of resulting Si:C:N films. Applied Surface Science 2007 253 17 7211 7218 2-s2.0-34248998557 10.1016/j.apsusc.2007. 02.193 (Pubitemid 46783137)
12. Hoche H., Allebrandt D., Bruns M., Riedel R., Fasel C., Relationship of chemical and structural properties with the tribological behavior of sputtered SiCN films. Surface and Coatings Technology 2008 202 22-23 5567 5571 2-s2.0-50349094236 10.1016/j.surfcoat.2008.06.126
13. Mishra S. K., Gaur H., Rupa P. K. P., Pathak L. C., Deposition of nanostructured Si-C-N superhard coatings by rf magnetron sputtering. Journal of Vacuum Science and Technology B 2006 24 3 1311 1317 2-s2.0-33744822751 10.1116/1.2200377 (Pubitemid 43838782)
14. Bhattacharyya A. S., Mishra S. K., Mukherjee S., Das G. C., A comparative study of Si-C-N films on different substrates grown by RF magnetron sputtering. Journal of Alloys and Compounds 2009 478 1-2 474 478 2-s2.0-67349262773 10.1016/j.jallcom.2008.11.105
15. Mishra S. K., Shekhar C., Rupa P. K. P., Pathak L. C., Effect of pressure and substrate temperature on the deposition of nano-structured silicon-carbon-nitride superhard coatings by magnetron sputtering. Thin Solid Films 2007 515 11 4738 4744 2-s2.0-33847139087 10.1016/j.tsf.2006.11.167 (Pubitemid 46282026)
16. 2/Ar gas mixture ratio and annealing on optical properties of SiCBN thin films prepared by rf sputtering. Diamond and Related Materials 2008 17 6 944 948 2-s2.0-42949096593 10.1016/j.diamond.2008.01.097 (Pubitemid 351614993)
17. Deng Z.-W., Souda R., XPS studies on silicon carbonitride films prepared by sequential implantation of nitrogen and carbon into silicon. Diamond and Related Materials 2002 11 9 1676 1682 2-s2.0-0036720633 10.1016/S0925-9635(02) 00143-7 (Pubitemid 34923429)
18. Bhattacharyya A. S., Mishra S. K., Mukherjee S., Correlation of structure and hardness of rf magnetron sputtered silicon carbonitride films. Journal of Vacuum Science and Technology A 2010 28 4 505 509 2-s2.0-77954191144 10.1116/1.3420430
19. Mishra S. K., Bhattacharyya A. S., Effect of substrate temperature on the adhesion properties of magnetron sputtered nano-composite Si-C-N hard thin films. Materials Letters 2008 62 3 398 402 2-s2.0-36448954631 10.1016/j.matlet.2007.05.043 (Pubitemid 350166598)
20. Bhattacharyya A. S., Mishra S. K., Raman studies on nanocomposite silicon carbonitride thin film deposited by r.f. magnetron sputtering at different substrate temperatures. Journal of Raman Spectroscopy 2010 41 10 1234 1239 2-s2.0-78751474771 10.1002/jrs.2588
21. Anstis G. R., Chantikul P., Lawn B. R., Marshall D. B., A critical evaluation of indentation techniques for measuring fracture toughness: I, direct crack measurements. Journal of the American Ceramic Society 1981 64 9 533 538 2-s2.0-0019106203