Influence of N2/Ar gas mixture ratio and annealing on optical properties of SiCBN thin films prepared by rf sputtering

Diamond and Related Materials

Volumn 17, Issue 6, 2008, Pages 944-948

  Vijayakumar, Arun ^a   Todi, Ravi M ^a,b   Warren, Andrew P ^b   Sundaram, Kalpathy B ^a,b  

^a University of Central Florida   (United States)

^b UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

Annealing; Band gap; Optical properties; SiCBN; Sputtering

Indexed keywords

ANNEALING; ARGON; OPTICAL PROPERTIES; SILICON COMPOUNDS; SPUTTERING;

GAS MIXTURE RATIO; SICBN THIN FILMS;

THIN FILMS;

EID: 42949096593     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.01.097     Document Type: Article

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