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Applied Surface Science

Volumn 293, Issue , 2014, Pages 248-254

Growth and fabrication of sputtered TiO 2 based ultraviolet detectors

(6) Huang, Huolin a,b Xie, Yannan a Zhang, Zifeng a Zhang, Feng c Xu, Qiang a Wu, Zhengyun a

a XIAMEN UNIVERSITY (China)

b NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

c INSTITUTE OF SEMICONDUCTORS (China)

Author keywords

Detectors; Low dark current; Magnetron sputtering; Photoconductive gain

Indexed keywords

DARK CURRENTS; DETECTORS; FABRICATION; MAGNETIC SEMICONDUCTORS; MAGNETRON SPUTTERING; TITANIUM DIOXIDE;

CHARACTERIZATION METHODS; COMMERCIAL PRODUCTIONS; FABRICATION PROCESS; HIGH CRYSTALLINITY; METAL-SEMICONDUCTOR-METAL STRUCTURES; OPTIMIZED PROCESS; PHOTOCONDUCTIVE GAINS; SCHOTTKY CONTACTS;

PALMPRINT RECOGNITION;

EID: 84895060189 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2013.12.142 Document Type: Article

Times cited : (48)

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