Effect of oxygen plasma treatment on characteristics of TiO2 photodetectors

IEEE Sensors Journal

Volumn 11, Issue 11, 2011, Pages 3031-3035

  Shih, W S ^a   Young, S J ^a   Ji, L W ^a   Water, W ^a   Meen, T H ^a   Shiu, H W ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

Author keywords

Metal semiconductor metal (MSM); photodetectors (PDs); rf sputter; titanium dioxide (TiO2 )

Indexed keywords

APPLIED BIAS; CORNING GLASS; EFFECT OF OXYGEN; FIELD EMISSION SCANNING ELECTRON MICROSCOPES; FOUR-POINT PROBE MEASUREMENTS; METAL SEMICONDUCTOR METAL; PLASMA CONDITIONS; PLASMA TREATMENT; RADIO FREQUENCY MAGNETRON SPUTTERING; RF SPUTTER; TIO; ULTRA-VIOLET;

MAGNETRON SPUTTERING; METALS; OPTOELECTRONIC DEVICES; OXIDES; PHOTODETECTORS; PLASMA APPLICATIONS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; TITANIUM;

TITANIUM DIOXIDE;

EID: 80055031313     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2011.2150212     Document Type: Article

References (32)

1. V. E. Henrich and P. A. Cox, The Surface Science of Metal Oxides. Cambridge, U.K.: Cambridge Univ. Press, 1996.
2. 2 /gold nanocomposites. Effect of metal particle size on the Fermi level equilibration," J. Amer. Chem. Soc., vol. 126, pp. 4943-4950, 2004. (Pubitemid 38490162)
3. 2 (110)," Phys. Rev. B, vol. 6, pp. 14066-14071, 2000.
4. 2 loaded with Fe, Cu or Pt," Appl. Catal. B, vol. 83, pp. 56-62, 2008.
5. R. Asahi, T. Morikawa, and T. Ohwaki, "Visible-light photocatalysis in nitrogen doped titanium oxides," Science, vol. 293, pp. 269-271, 2001. (Pubitemid 32694736)
6. 2 (1 1 0)," Phys. Rev. Lett., vol. 84, pp. 3646-3649, 2000.
7. A. Fujishima and K. Honda, "Electrochemical photolysis of water at a semiconductor electrode," Nature, vol. 238, pp. 37-38, 1972.
8. 2 ultraviolet detectors with Ni electrodes," Appl. Phys. Lett., vol. 94, pp. 123-502, 2009.
9. 2 nanotube arrays for low temperature oxygen sensors," Nonotechnology, vol. 19, pp. 405-504, 2002.
10. 2," Phys. Rev. B, vol. 28, pp. 3427-3438, 1983.
11. 2 (110)," Phys. Rev. Lett., vol. 87, p. 6104, 2001.
12. 2 (110)," J. Phys. Chem. B, vol. 110, pp. 7431-7435, 2006.
13. 2 (110) using a surface photoreaction," J. Phys. Chem. B, vol. 109, pp. 18230-18236, 2005.
14. 22," Phys. Rev. B, vol. 54, pp. 7945-7956, 1996.
15. 2 (110) surfaces having different defect densities," J. Vac. Sci. Technol. A, vol. 10, pp. 2470-2476, 1992.
16. 2 (110): A density functional theory study," J. Chem. Phys., vol. 120, pp. 988-997, 2004.
17. 2 (110)," Surf. Sci., vol. 218, pp. 178-200, 1989.
18. 2 (110) resulting from O dissociation at vacancy sites," Surf. Sci., vol. 333, pp. 412-413, 1998.
19. 2 (110) surface: Molecular and dissociative channels," J. Phys. Chem., vol. 103, pp. 5328-5337, 1999. (Pubitemid 129702807)
20. 2 (110) (1×1) surface and their reaction with oxygen: A scanning tunneling microscopy study," Surf. Sci., vol. 411, pp. 137-157, 1998.
21. 2," J. Mater. Sci., vol. 15, pp. 37-41, 2004.
22. C. M. Chan and T.-M. Ko, "Polymer surface modification by plasmas and photons," Surface Sci. Reports, vol. 24, pp. 1-54, 1996. (Pubitemid 126383843)
23. C. Oehr, "Plasma surface modification of polymers for biomedical use," NIM B, vol. 208, pp. 40-47, 2003.
24. I. Pashkuleva, A. P. Marques, and F. Vaz, "Surface modification of starch based biomaterials by oxygen plasma or UV irradiation," J. Mater. Sci., vol. 21, pp. 21-32, 2010.
25. 22," Phys. Rev. Lett., vol. 36, pp. 1335-1339, 1976.
26. Y. W. Chung, W. J. Lo, and G. A. Somorjai, "Low energy electron diffraction and electron spectroscopy studies of the clean (110) and (100) titanium dioxide (rutile) crystal surfaces," Surf. Sci., vol. 64, p. 588, 1977.
27. 2 powders," Chem. Mater., vol. 14, pp. 3808-3816, 2002.
28. M. Anpo, N. Aikawa, Y. Kubokawa, M. Che, C. Louis, and E. Giamello, "Photoluminescence and photocatalytic activity of highly dispersed titanium oxide anchored onto porous Vycor glass," J. Phys. Chem., vol. 89, pp. 5017-5021, 1985.
29. W. F. Zhang, M. S. Zhang, Z. Yin, and Q. Chen, "Photoluminescence in anatase titanium dioxide nanocrystals," Appl. Phys. B, vol. 70, pp. 261-265, 2000.
30. A. K. Ghosh, F. G. Wakim, and R. R. Addiss, "Photoelectronic processes in rutile," Phys. Rev., vol. 184, pp. 979-988, 1969.
31. K. Shin, S. Y. Yang, and C. Yang, "Oxygen plasma treatment and postaging of pentacene field-effect transistors for improved mobility," Appl. Phys. Lett., vol. 91, p. 023508, 2007.
32. 2 based metal-semiconductor-metal ultraviolet photodetectors," Appl. Phys. Lett., vol. 90, p. 201118, 2007.