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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 32, Issue 2, 2014, Pages

Chemical bonding and defect states of LPCVD grown silicon-rich Si 3N4 for quantum dot applications

(4) Mohammed, Shakil a Nimmo, Michael T b Malko, Anton V b Hinkle, Christopher L a

a The University of Texas at Dallas (United States)

b UNIVERSITY OF TEXAS AT DALLAS (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84894455917 PISSN: 07342101 EISSN: 15208559 Source Type: Journal
DOI: 10.1116/1.4861338 Document Type: Article

Times cited : (18)

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