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Journal of Applied Physics

Volumn 104, Issue 10, 2008, Pages

Fourier transform infrared spectroscopy of annealed silicon-rich silicon nitride thin films

(4) Scardera, G a Puzzer, T a Conibeer, G a Green, M A a

a UNIVERSITY OF NEW SOUTH WALES (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; INFRARED SPECTROSCOPY; NANOCRYSTALLINE ALLOYS; NANOCRYSTALS; NITRIDES; NONMETALS; OPTICAL WAVEGUIDES; SILICON; SILICON NITRIDE; SPECTROSCOPIC ANALYSIS; THICK FILMS;

BONDING CONFIGURATIONS; FOURIER TRANSFORM INFRARED; HIGH TEMPERATURES; N2 AMBIENT; POSTANNEALING; SILICON NANOCRYSTALS; SILICON NITRIDE THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 57049129315 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3021158 Document Type: Article

Times cited : (102)

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