Performance of electro-thermally driven VO2-based MEMS actuators

Journal of Microelectromechanical Systems

Volumn 23, Issue 1, 2014, Pages 243-251

  Cabrera, Rafmag ^a   Merced, Emmanuelle ^a   Sepulveda, Nelson ^a  

^a Michigan State University   (United States)

Author keywords

actuator dynamics; MEMS actuators; phase transition; vanadium dioxide

Indexed keywords

EID: 84894060204     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2271774     Document Type: Article

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