Frequency tuning of VO2-coated buckled microbridges

Journal of Microelectromechanical Systems

Volumn 20, Issue 3, 2011, Pages 558-560

  Merced, Emmanuelle ^a   Cabrera, Rafmag ^a   Coy, Horacio ^a   Fernandez, Félix E ^a   Sepulveda, Nelson ^a  

^a UNIVERSITY OF PUERTO RICO   (Puerto Rico)

Author keywords

Buckled microbridges; phase transition materials; tunable microelectromechanical systems (MEMS); vanadium dioxide

Indexed keywords

FREQUENCY-TUNING; INSULATOR-TO-METAL TRANSITIONS; LASER DIODES; LIGHT IRRADIATIONS; MICRO-BRIDGE; MICROBRIDGES; MICROELECTROMECHANICAL SYSTEMS; PELTIER; PHASE TRANSITION MATERIALS; RESONANT FREQUENCY SHIFT; SILICON DIOXIDE; STRESS LEVELS; THERMALLY INDUCED; VANADIUM DIOXIDE;

MEMS; METAL INSULATOR TRANSITION; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; SILICA; SILICON COMPOUNDS; SILICON OXIDES; VANADIUM;

COATED MATERIALS;

EID: 79957989571     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2140361     Document Type: Article

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